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Plasma electronics applications in microelectronic device fabrication Toshiaki Makabe and Zoran Lj. Petrovic

By: Contributor(s): Material type: TextTextSeries: Series in Plasma PhysicsPublication details: New York Taylor & Francis 2006Description: 339p. fig.;ill.;index.;ref
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Item type Current library Call number Status Date due Barcode
Books Mumbai General Stack 533.9:621.38/MAK (Browse shelf(Opens below)) Available 008501

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