Plasma electronics applications in microelectronic device fabrication
Makabe, Toshiaki
Plasma electronics applications in microelectronic device fabrication Toshiaki Makabe and Zoran Lj. Petrovic - New York Taylor & Francis 2006 - 339p. fig.;ill.;index.;ref. - Series in Plasma Physics .
533.9:621.38 / MAK
Plasma electronics applications in microelectronic device fabrication Toshiaki Makabe and Zoran Lj. Petrovic - New York Taylor & Francis 2006 - 339p. fig.;ill.;index.;ref. - Series in Plasma Physics .
533.9:621.38 / MAK